Refractory Anode Temperature Measurement in a Vacuum Arc.


  Y. Koulik  ,  I.I. Beilis  ,  R.L. Boxman  
Electrical Discharge and Plasma Laboratory, Tel Aviv University

The time dependent anode temperature was measured in a hot refractory anode vacuum arc (HRAVA) sustained between a consumed water-cooled cylindrical Cu cathode and non-consumed cylindrical W anodes with thickness d=5,10,15,20 and 30 mm separated by gaps of 5,10,15 and 20 mm. Arc currents of I=130, 150, 175 and 200 A were applied for periods up to 210 s. The anode temperature was measured using high-temperature thermocouples at different points in the anode body. The visual radiation emitted by the plasma plume was recorded with a digital camera.

The anode temperature increased with time, reaching a steady state value which slightly increased with arc current. The anode temperature decreased with the gap, and was higher for thinner anodes. When d was increased from 5 to 30 mm, the time for the anode front surface to reach the steady state increased from 45 to 140 s, while this temperature decreased from 2525 to 2325 K (I=175 A). Thus minimizing d advantageously minimizes the start-up transient when using the radially expanding HRAVA plasma plume for thin film deposition.