The development of high performance and long lasting cameras and detectors for the Deep Ultra-Violet (DUV) is a major challenge due to the unique nature of the photon-matter interaction in this region of wavelengths. A high performance, DUV camera with a superlattice doped CMOS imaging detector was developed and tested. Superlattice doped detectors achieve nearly 100% internal quantum efficiency in the deep and far ultraviolet. A single layer, Al2O3 antireflection coating enabled 64% external quantum efficiency at 263nm. In lifetime tests performed, using 263nm pulsed, solid state and 193nm pulsed excimer lasers, the quantum efficiency and dark current of the camera remained stable to better than 1% precision during long-term exposure to direct illumination with several billion laser pulses. This represents, an unparalleled, orders of magnitude more stable operation, than any other technology tested.