We study intrinsic localized modes (ILMs), or solitons, in arrays of parametrically driven nonlinear resonators with application to microelectromechanical and nanoelectromechanical systems (MEMS and NEMS). The analysis is performed using an amplitude equation in the form of a nonlinear Schrödinger equation with a term corresponding to nonlinear damping (also known as a forced complex Ginzburg-Landau equation), which is derived directly from the underlying equations of motion of the coupled resonators, using the method of multiple scales. We investigate the creation, stability, and interaction of ILMs, show that they can form bound states, and that under certain conditions one ILM can split into two. Our findings are confirmed by simulations of the underlying equations of motion of the resonators, suggesting possible experimental tests of the theory.